硅窗片
| 屬性 | 規(guī)范參數(shù) |
| 標(biāo)準(zhǔn)直徑 (Φmm) | 8.0, 10.0, 12.7, 15.0, 20.0, 25.4, 30.0 |
| 標(biāo)準(zhǔn)厚度 (mm) | 1.0 ～ 10.0 |
| 直徑公差 (mm) | +0.0/-0.2 (General), +0.0/-0.1 (High Precision) |
| 厚度公差 (mm) | ±0.2 (General), ±0.05 (High Precision) |
| 通光孔徑 | >75% (Small Size), >90% (Large Size) |
| 平行度 | 3 min. (General), 10 sec. (High Precision) |
| 表面質(zhì)量 | 80/50 (General), 40/20 (High Precision) |
| 面型 (per 25mm@633nm) | λ(General), λ/4 (High Precision) |
| 倒角 (face width x 45。) | <0.25mm |
| 鍍膜 | Uncoated, AR, HR, PR, Coating, etc. |
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